NEC/Tokin Metal-Sealed Actuators
Metal Sealed Multilayer Actuators
NEC-Tokin Metal sealed actuator are air-tighted sealed piezoelectric actuators which provide protection from the atmosphere. They are specially suitable for high humidity environmental applications such as semiconductor device production equipment and optical communication equipment requiring vey high reliability. NEC-Tokin actuators also provide preload to the internal piezoelectric actuator and thus better dynamic behaviour.
